Title: "Materials Engineering on Si, Ge and III-V Thin-Films and Dielectric Integration for High-Performance Transistors and Solar Cells"

Abstract:

In this talk, I will present three experimental approaches where both materials engineering and dielectric integration techniques are deployed to achieve scientific goals. The goals are following: first, to establish a materials engineering solution to grow low dislocation density, high-quality Ge on Si at the wafer-scale, second to integrate high performance MOSFETs on Ge film, and to fabricate FinFETs on III-V Films, and third to demonstrate manufacturable, cost-effective engineering solutions of fabricating of nanophotonic structures on c-Si thin film especially for solar cells. These contributions would illustrate that I have performed an entire spectrum of materials science and semiconductor nano-engineering research: i.e., starting from epitaxial growth and characterization, to process development, to device fabrication, to characterization.